High Pure 99.8% titanium grade 7 rounds sputtering targets ti alloy target for coating factory supplier
Product parameters
| Product name | Titanium target for pvd coating machine |
| Grade | Titanium (Gr1, Gr2, Gr5, Gr7,GR12) Alloy target: Ti-Al, Ti-Cr, Ti-Zr etc |
| Origin | Baoji city Shaanxi Province china |
| Titanium content | ≥99.5 (%) |
| Impurity content | <0.02 (%) |
| Density | 4.51 or 4.50 g/cm3 |
| Standard | ASTM B381; ASTM F67, ASTM F136 |
| Size | 1. Round target: Ø30--2000mm, thickness 3.0mm--300mm; 2. Plate Targe: Length: 200-500mm Width:100-230mm Thickness:3--40mm; 3. Tube target: Dia:30-200mm Thickness:5-20mm Length:500-2000mm; 4. Customized is available |
| Technique | Forged and CNC Machined |
| Application | Semiconductor separation, Film coating materials, Storage Electrode coating, Sputtering coating, Surface coating, Glass coating industry. |
Chemical requirements of titanium target
|
ASTM B265 |
GB/T 3620.1 |
JIS H4600 |
Elemental content(≤wt%) |
||||||
|
N |
C |
H |
Fe |
O |
Others |
||||
|
Titanium Pure |
Gr.1 |
TA1 |
Class1 |
0.03 |
0.08 |
0.015 |
0.20 |
0.18 |
/ |
|
Gr.2 |
TA2 |
Class2 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
/ |
|
|
Titanium Alloy |
Gr.5 |
TC4 Ti-6Al-4V |
Class60 |
0.05 |
0.08 |
0.015 |
0.40 |
0.2 |
Al:5.5-6.75 V:3.5-4.5 |
|
Gr.7 |
TA9 |
Class12 |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
Pd:0.12-0.25 |
|
|
Gr.12 |
TA10 |
Class60E |
0.03 |
0.08 |
0.015 |
0.30 |
0.25 |
Mo:0.2-0.4 Ni:0.6-0.9 |
|
Longitudinal mechanical properties at room temperature
|
Grade |
Tensile strength Rm/MPa(>=) |
Yield strength Rp0.2(MPa) |
Elongation A4D(%) |
Reduction of area Z(%) |
|
Gr1 |
240 |
140 |
24 |
30 |
|
Gr2 |
400 |
275 |
20 |
30 |
|
Gr5 |
895 |
825 |
10 |
25 |
|
Gr7 |
370 |
250 |
20 |
25 |
|
Gr12 |
485 |
345 |
18 |
25 |
Titanium Sputtering Targets
The common size of the titanium sputter target: Φ100*40, Φ98*40, Φ95*45, Φ90*40, Φ85*35, Φ65*40 etc.
Also can customize according to customer' requests or drawings
Target requirements: high purity, uniform crystal grains, and good compactness.
Purity: 99.5%, 99.95%, 99.98%, 99.995%.
Titanium Target Production process
titanium sponge --- smelted to titanium ingot --- test---cutting the ingot --- forging ---rolling ---peeling --- straightening---ultrasonic flaw detection --- packing
Titanium target Features
1. Low Density and High Specification Strength
2. Excellent Corrosion Resistance
3. Good Resistance to Effect of Heat
4. Excellent Bearing to Cryogenics Property
5. Nonmagnetic and Non-toxic
6. Good Thermal Properties
7. Low Modulus of Elasticity
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