Cathodic Cobalt - Tantalum Target – HSG Metal
Cathodic Cobalt - Tantalum Target – HSG Metal Detail:
Product parameters
Product Name:high purity tantalum target pure tantalum target | |
Material | Tantalum |
Purity | 99.95%min or 99.99%min |
Color | A shiny, silvery metal that is very resistant to corrosion. |
Other name | Ta target |
Standard | ASTM B 708 |
Size | Dia >10mm * thick >0.1mm |
Shape | Planar |
MOQ | 5pcs |
Delivery time | 7days |
Used | Sputtering Coating Machines |
Table 1: Chemical composition
Chemistry (%) | |||||||||||||
Designation | Chief component | Impurities maxmium | |||||||||||
Ta | Nb | Fe | Si | Ni | W | Mo | Ti | Nb | O | C | H | N | |
Ta1 | Remainder | 0.004 | 0.003 | 0.002 | 0.004 | 0.006 | 0.002 | 0.03 | 0.015 | 0.004 | 0.0015 | 0.002 | |
Ta2 | Remainder | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | 0.08 | 0.02 | 0.01 | 0.0015 | 0.01 |
Table 2: Mechanical requirements (annealed condition)
Grade and size |
Annealed |
||
Tensile strength min, psi (MPa) |
Yield strength min,psi (MPa)(2%) |
Elongation min, % (1 inch gage length) |
|
Sheet, foil. and board (RO5200, RO5400) Thickness<0.060″(1.524mm) Thickness≥0.060″(1.524mm) |
30000 (207) |
20000 (138) |
20 |
25000 (172) |
15000 (103) |
30 |
|
Ta-10W (RO5255) Sheet, foil. and board |
70000 (482) |
60000 (414) |
15 |
70000 (482) |
55000 (379) |
20 |
|
Ta-2.5W (RO5252) Thickness<0.125″ (3.175mm) Thickness≥0.125″ (3.175mm) |
40000 (276) |
30000 (207) |
20 |
40000 (276) |
22000 (152) |
25 |
|
Ta-40Nb (RO5240) Thickness<0.060″(1.524mm) |
40000 (276) |
20000 (138) |
25 |
Thickness>0.060″(1.524mm) |
35000 (241) |
15000 (103) |
25 |
Size and Purity
Diameter: dia (50~400)mm
Thickness: (3~28mm)
Grade: RO5200,RO 5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Purity: >=99.95% , >=99.99%
Our advantage
Recrystallization: 95% minimum Grain size: minimum 40μm Surface roughness: Ra 0.4 max Flatness: 0.1mm or 0.10% max. Tolerance: diameter tolerance +/- 0.254
Application
Tantalum target, as an electrode material and surface engineering material, has been widely used in the coating industry of liquid crystal display (LCD), heat-resistant corrosion and high conductivity.
Product detail pictures:

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